Oxford Instruments

Oxford Instruments

OI
Company Profile

Oxford Instruments

Concord, United States of America

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About

About Oxford Instruments Oxford Instruments Plasma Technology designs, manufactures and delivers leading‑edge plasma processing solutions and applications to the compound semiconductor industry. Critical technology offerings include plasma‑enhanced atomic layer deposition (PEALD) and atomic layer etch (ALE), conventional plasma deposition and etch and ion‑beam deposition and etch.

Address
300 Baker Ave, Suite 150, Concord MA 01742, United States of America

Products

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Fully automated processing equipment for 6” InP wafer processing.
Sustainability

Fully automated processing equipment for 6” InP wafer processing.

Discover how Oxford Instruments is enabling Coherent Corp. to reach world-class performance for 6-inch indium phosphide device fabrication. Oxford Instruments p...

Oxford Instruments
Concord, United States of America
OFC 2026